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Microelectromechanical systems

A six-wafer combustion system for a silicon micro gas turbine engine

Packaging / Combustion / Microelectromechanical systems / Air flow / Fuel / Compressor / Systems / Package / Aerofoil Design / Experimental Tests / Reactive ion etching / Electric Power / Fuel Injector / Fluidics / Combustion Chamber / Elevated Temperature / Mass Flow Rate / Electrical And Electronic Engineering / Wafer / Compressor / Systems / Package / Aerofoil Design / Experimental Tests / Reactive ion etching / Electric Power / Fuel Injector / Fluidics / Combustion Chamber / Elevated Temperature / Mass Flow Rate / Electrical And Electronic Engineering / Wafer

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Contact-Printed Microelectromechanical Systems

Engineering / Fluorescence Microscopy / Advanced Materials / Microelectromechanical systems / Actuators / Printing / Physical sciences / CHEMICAL SCIENCES / Flexible Electronics / Microcontact Printing / Advanced / Printing / Physical sciences / CHEMICAL SCIENCES / Flexible Electronics / Microcontact Printing / Advanced

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